Date : 11-01-18 13:45
Inorganic / Organic Vacuum deposition Equipment
 Author : Lantech
Views : 887  
Inorganic /  Organic Vacuum deposition Equipment




 

This thin film deposition equipment is designed for organic EL device, organic EL illumination, and organic solar cells.
A thin inorganic film is laminated in the sealant skin through ion-beam sputtering, using a linear source as a cushion skin. This enables seamless coating of inorganic and organic films. Particularly, for more uniform thickness, a newly developed linear source is used instead of CVD as the organic film.

Features

Standard Specifications
Substrate Size 400X550mm
Vacuum 1X10-1pa (Order)
Film forming thickness 2-3um
Substrate temperature range 10- 80°C
Feeding system Per sheet